Control PCB for sputtering aggregates
A control PCB for sputtering aggregates with monitoring of current, voltage, power and energy. The PCB contains a Spartan FPGA from Xilinx, a Rabbit microprocessor, and analog interfaces for accurate measurements and control in a very disturbed environment. A number of serial interfaces, such as Profibus. Control tables are downloaded for control of sputtering course and other selectable properties.